JPS61114839U - - Google Patents
Info
- Publication number
- JPS61114839U JPS61114839U JP19799284U JP19799284U JPS61114839U JP S61114839 U JPS61114839 U JP S61114839U JP 19799284 U JP19799284 U JP 19799284U JP 19799284 U JP19799284 U JP 19799284U JP S61114839 U JPS61114839 U JP S61114839U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- semiconductor
- suctions
- vacuum
- holds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 claims description 9
- 239000011810 insulating material Substances 0.000 claims 1
Landscapes
- Feeding Of Workpieces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19799284U JPS61114839U (en]) | 1984-12-28 | 1984-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19799284U JPS61114839U (en]) | 1984-12-28 | 1984-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61114839U true JPS61114839U (en]) | 1986-07-19 |
Family
ID=30756607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19799284U Pending JPS61114839U (en]) | 1984-12-28 | 1984-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61114839U (en]) |
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1984
- 1984-12-28 JP JP19799284U patent/JPS61114839U/ja active Pending